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JCMsuite Applications in R&D
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optical metrology and sensing
Displaying items by tag: optical metrology and sensing
3D-nanoprinted on-chip antiresonant waveguide with hollow core and microgaps for integrated optofluidic spectroscopy
Published in
2023
Tagged under
photonic waveguides and fibers
optical metrology and sensing
light scattering computation
Read more...
Nanostructures for in-situ surface-enhanced Kretschmann-Raether ellipsometry
Published in
2023
Tagged under
optical metrology and sensing
plasmonics
optimization and parameter retrieval methods
Read more...
Impact study of numerical discretization accuracy on parameter reconstructions and model parameter distributions
Published in
2023
Tagged under
integrated optics
optical and EUV lithography
optical metrology and sensing
optimization and parameter retrieval methods
Read more...
Pushing the boundaries of EUV scatterometry reconstruction of complex nanostructures for next-generation transistor technology
Published in
2023
Tagged under
optical and EUV lithography
optical metrology and sensing
optimization and parameter retrieval methods
Read more...
Challenges of Grazing Emission X-ray Fluorescence GEXRF for the Characterization of Advanced Nanostructured Surfaces
Published in
2022
Tagged under
optical metrology and sensing
optical and EUV lithography
optimization and parameter retrieval methods
light scattering computation
Read more...
Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples
Published in
2022
Tagged under
optical metrology and sensing
light scattering computation
Read more...
Bayesian Target-Vector Optimization for Efficient ParameterReconstruction
Published in
2022
Tagged under
optical metrology and sensing
optimization and parameter retrieval methods
uncertainty quantification methods
Read more...
Sub-diffraction limited localization of self-interacting nanoparticles above a mirror
Published in
2021
Tagged under
optical metrology and sensing
light scattering computation
Read more...
Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering
Published in
2021
Tagged under
optical metrology and sensing
light scattering computation
Read more...
Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology
Published in
2021
Tagged under
optical metrology and sensing
optimization and parameter retrieval methods
Read more...
Shape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning
Published in
2021
Tagged under
optical metrology and sensing
light scattering computation
optimization and parameter retrieval methods
uncertainty quantification methods
Read more...
Long- and short-ranged chiral interactions in DNA-assembled plasmonic chains
Published in
2021
Tagged under
optical chirality
optical resonators and antennas
plasmonics
optical metrology and sensing
light scattering computation
advanced finite element methods
Read more...
Self-Assembly of Plasmonic Nanoantenna-Waveguide Structures for Subdiffractional Chiral Sensing
Published in
2020
Tagged under
optical chirality
optical resonators and antennas
plasmonics
optical metrology and sensing
light scattering computation
Read more...
Inverted plasmonic lens design for nanometrology applications
Published in
2020
Tagged under
diffractive optics
plasmonics
optical metrology and sensing
light scattering computation
Read more...
Scanning tunneling microscopy for probing the dielectric response of metals at the atomic scale
Published in
2020
Tagged under
optical metrology and sensing
optical resonators and antennas
light scattering computation
Read more...
Helicity-Preserving Optical Cavity Modes for Enhanced Sensing of Chiral Molecules
Published in
2020
Tagged under
optical chirality
optical metrology and sensing
light scattering computation
Read more...
Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence
Published in
2018
Tagged under
optical metrology and sensing
optical and EUV lithography
light scattering computation
optimization and parameter retrieval methods
Read more...
Metrology of nanoscale grating structures by UV scatterometry
Published in
2017
Tagged under
optical metrology and sensing
light scattering computation
optimization and parameter retrieval methods
Read more...
Investigating surface structures by EUV scattering
Published in
2017
Tagged under
optical metrology and sensing
optical and EUV lithography
advanced finite element methods
optimization and parameter retrieval methods
uncertainty quantification methods
Read more...
Whispering gallery mode lasers for sensing applications
Published in
2017
Tagged under
light sources
optical metrology and sensing
optical resonators and antennas
resonance mode computation
Read more...
Evaluating the effects of modeling errors for isolated finite three-dimensional targets
Published in
2017
Tagged under
optical metrology and sensing
optical and EUV lithography
advanced finite element methods
optimization and parameter retrieval methods
Read more...
Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
Published in
2017
Tagged under
optical metrology and sensing
other fields
advanced finite element methods
optimization and parameter retrieval methods
uncertainty quantification methods
light scattering computation
Read more...
FEM for validation of alternative scattering computation method
Published in
2017
Tagged under
optical metrology and sensing
optical and EUV lithography
other fields
software benchmarks
light scattering computation
Read more...
Modeling of Optical Imaging of Finite Multi-Line Arrays
Published in
2016
Tagged under
optical and EUV lithography
optical metrology and sensing
light scattering computation
other methods
Read more...
Quantitative optical imaging for in-die-capable critical dimension targets
Published in
2016
Tagged under
optical metrology and sensing
optical and EUV lithography
advanced finite element methods
optimization and parameter retrieval methods
Read more...
Design of a plasmonic near-field tip for super-resolution IR-imaging
Published in
2016
Tagged under
plasmonics
optical metrology and sensing
photonic waveguides and fibers
light scattering computation
Read more...
Efficient Bayesian inversion for shape reconstruction of lithography masks
Published in
2010
Tagged under
optical metrology and sensing
optical and EUV lithography
uncertainty quantification methods
optimization and parameter retrieval methods
light scattering computation
Read more...
Crescent-Shaped Metal Nanoparticles for Sensing Applications
Published in
2009
Tagged under
optical metrology and sensing
plasmonics
light scattering computation
Read more...
Benchmark of computational methods for mask simulation in optical lithography
Published in
2005
Tagged under
optical metrology and sensing
optical and EUV lithography
software benchmarks
Read more...
JCMsuite used for Mueller matrix ellipsometry
Published in
2019
Tagged under
optical metrology and sensing
optimization and parameter retrieval methods
software benchmarks
Read more...
Benchmark of Global Optimization Approaches for Nano-optical Shape Optimization and Parameter Reconstruction
Published in
2019
Tagged under
optical metrology and sensing
optical and EUV lithography
metamaterials
quantum optics
optimization and parameter retrieval methods
software benchmarks
Read more...
Gaussian process regression for efficient parameter reconstruction
Published in
2019
Tagged under
optical metrology and sensing
optical and EUV lithography
optimization and parameter retrieval methods
software benchmarks
Read more...
EUV mask feature reconstruction via phase retrieval
Published in
2019
Tagged under
optical metrology and sensing
optical and EUV lithography
light scattering computation
Read more...
Grazing incidence x-ray fluorescence based profile reconstruction
Published in
2019
Tagged under
optical metrology and sensing
optical and EUV lithography
optimization and parameter retrieval methods
advanced finite element methods
Read more...
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